係指在規定條件下,一種特定氣體通過漏孔的流量。
真空泵的漏率與極限壓力有直接關係,在極限壓力下運轉的真空泵zhong,tadeqitizhuangtaiyijiejinfenziliu,qitidefenziziyouchengjiaoda,qitifenzibuyichuantouzhuanziyugexiangguanlingbujianzhijiandejianxi,yejiushishuocishijianxiduijixianyalideyingxiangyijiqiweixiao,nengyingxiangjixianyalideyinsujiuzhiyouloulvle。suoweizhenkongbengdadaolejixianyali,jiushishenloujinruzhenkongbengdeqitiyuzhenkongbengchouchudeqitidadaoledongtaipingheng,jinrulexiangduiwendingzhuangtai。
真空泵漏率的測試方法有關閥測漏法和氦質譜測漏法二種。
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